A Study of Pattern and Feature Analysis of Surface Generation in Fast Tool Servo Machining of Optical Microstructures

Nowadays, there are lack of definitive international standards, surface parameters and techniques for the characterisation of the surface generation of optical microstructures with the articulation to their quality specifications in practical applications. This paper presents a study of factors affecting the surface generation in FTS machining of optical microstructures. The surface quality and defects of the machined surfaces are examined by a non-contact interferometric surface profiler. Surface features and patterns are analysed based on power spectrum analysis and are correlated with the surface quality of the optical microstructures. The results form the basis for the development of the pattern and feature analysis algorithms for the characterisation of surface generation in FTS machining of optical microstructures.